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Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes.
M. Sterner
Göran Stemme
Joachim Oberhammer
Published in:
NEMS (2010)
Keyphrases
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multi layer
electron microscopy
thin film
feed forward neural networks
error back propagation
neural network
multiple layers
neural nets
single layer
expert systems
x ray
high density
group sparse coding
machine learning
microscopy images