M. Sterner

Publication Activity (10 Years)

Years Active: 2010-2010
Publications (10 Years): 0

Publications

M. Sterner, Göran Stemme, Joachim Oberhammer
Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes. NEMS (2010)