High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC).
Yuancheng YangBaotong ZhangXiaoqiao DongXiaokang LiShuang SunQifeng CaiRan BiXiaoyan XuMing LiRu HuangPublished in: Sci. China Inf. Sci. (2020)
Keyphrases
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