Using Genetic Algorithms with Local Search for Thin Film Metrology.
Mark LandJohn J. SIDorowichRichard K. BelewPublished in: ICGA (1997)
Keyphrases
- thin film
- genetic algorithm
- search algorithm
- single view
- camera calibration
- solar cell
- global search
- high density
- combinatorial optimization
- process control
- multi layer
- short circuit
- simulated annealing
- electron microscopy
- multi view
- memetic algorithm
- optimal solution
- grain size
- multiple views
- search space
- room temperature
- database
- tabu search
- neural network