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Characteristics and fabrication of nanohole array on InP semiconductor substrate using nanoporous alumina.
Mi Jung
Seok Lee
Young Tae Byun
Young Min Jhon
Sun Ho Kim
Deok-Ha Woo
Sun-il Mho
Published in:
Microelectron. J. (2008)
Keyphrases
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semiconductor devices
electron beam
expert systems
magnetic recording
neural network
integrated circuit
high density
plasma etching
artificial intelligence
knowledge base
website
clustering algorithm
decision trees
electron beam lithography