Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook.
Claude YugmaJakey BlueStéphane Dauzère-PérèsPhilippe VialletellePublished in: CASE (2014)
Keyphrases
- semiconductor manufacturing
- process control
- control system
- discrete event simulation
- intelligent control
- scheduling algorithm
- product quality
- scheduling problem
- manufacturing process
- round robin
- neural network
- real time
- object oriented
- literature review
- management tools
- real time database systems
- flexible manufacturing systems
- dynamic scheduling
- artificial intelligence