Fabrication of flexible microlens array through vapor-induced room temperature dewetting on plasma treated Parylene-C.
Xiao-Peng BiWen LiPublished in: EMBC (2014)
Keyphrases
- room temperature
- thin film
- high density
- plasma etching
- chemical vapor deposition
- high energy
- case study
- thermal conductivity
- scanning electron microscope
- electrical properties
- low density
- magnetic field
- databases
- diffusion process
- neural network
- data sets
- programmable logic
- lightweight
- high speed
- computational complexity
- data mining
- real time