Wafer-Scale Bi-Assisted Semi-Auto Dry Transfer and Fabrication of High-Performance Monolayer CVD WS2 Transistor.

Ming-Yang Li Ching-Hao Hsu Shin-Wei Shen Ang-Sheng Chou Yuxuan Cosmi Lin Chih-Piao Chuu Ning Yang Sui-An Chou Lin-Yun Huang Chao-Ching Cheng Wei-Yen Woon Szuya Liao Chih-I Wu Lain-Jong Li Iuliana Radu H.-S. Philip Wong Han Wang

Published in: VLSI Technology and Circuits (2022)

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