Machine Learning Based V-ramp VBD Predictive Model Using OCD-measured Fab Parameters for Early Detection of MOL Reliability Risk.
SungMan RheeHyunjin KimSangku ParkTaiki UemuraYuchul HwangSeungjin ChooJinju KimHwasung RheeShin-Young ChungPublished in: IRPS (2023)
Keyphrases
- early detection
- predictive model
- machine learning
- decision trees
- lung cancer
- breast cancer
- automatic diagnosis
- risk factors
- machine learning algorithms
- neural network
- risk management
- skin cancer
- historical data
- prediction model
- computational intelligence
- supervised learning
- active learning
- data sets
- decision making
- feature selection
- classification rules
- classification models
- probabilistic model
- risk assessment
- artificial neural networks
- association rules
- knowledge discovery