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PREVAIL-Electron projection technology approach for next-generation lithography.

Rajinder S. DhaliwalWilliam A. EnichenSteven D. GolladayMichael S. GordonRodney A. KendallJon E. LiebermanHans C. PfeifferDavid J. PinckneyChristopher F. RobinsonJames D. RockrohrWerner StickelEileen V. Tressler
Published in: IBM J. Res. Dev. (2001)
Keyphrases
  • electron beam lithography
  • electron beam
  • x ray
  • case study
  • data processing
  • web intelligence
  • cost effective
  • technological advances
  • data mining
  • key technologies