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Hans C. Pfeiffer
Publication Activity (10 Years)
Years Active: 1993-2001
Publications (10 Years): 0
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Publications
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Rajinder S. Dhaliwal
,
William A. Enichen
,
Steven D. Golladay
,
Michael S. Gordon
,
Rodney A. Kendall
,
Jon E. Lieberman
,
Hans C. Pfeiffer
,
David J. Pinckney
,
Christopher F. Robinson
,
James D. Rockrohr
,
Werner Stickel
,
Eileen V. Tressler
PREVAIL-Electron projection technology approach for next-generation lithography.
IBM J. Res. Dev.
45 (5) (2001)
Timothy R. Groves
,
John G. Hartley
,
Hans C. Pfeiffer
,
Denise Puisto
,
Donald K. Bailey
Electron beam lithography tool for manufacture of X-ray masks.
IBM J. Res. Dev.
37 (3) (1993)