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John G. Hartley
Publication Activity (10 Years)
Years Active: 1993-1993
Publications (10 Years): 0
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Publications
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Timothy R. Groves
,
John G. Hartley
,
Hans C. Pfeiffer
,
Denise Puisto
,
Donald K. Bailey
Electron beam lithography tool for manufacture of X-ray masks.
IBM J. Res. Dev.
37 (3) (1993)