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thin-film capacitors fabricated by chemical solution deposition process.
Masatoshi Onoue
Takaaki Miyasako
Eisuke Tokumitsu
Tatsuya Shimoda
Published in:
IEICE Electron. Express (2014)
Keyphrases
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thin film
short circuit
high density
mathematical model
electron microscopy
decision making
grain size
plasma etching
genetic algorithm
database systems
data analysis
high speed
multi layer
film thickness