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Fabrication and characterization of SiC thin films.

Lei LiuWei TangBai-xiang ZhengHaixia Zhang
Published in: NEMS (2011)
Keyphrases
  • thin film
  • high density
  • plasma etching
  • chemical vapor deposition
  • low density
  • short circuit
  • grain size
  • integrated circuit
  • solar cell
  • data center
  • white light interferometry
  • multi layer
  • room temperature
  • film thickness