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Fabrication and characterization of SiC thin films.
Lei Liu
Wei Tang
Bai-xiang Zheng
Haixia Zhang
Published in:
NEMS (2011)
Keyphrases
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thin film
high density
plasma etching
chemical vapor deposition
low density
short circuit
grain size
integrated circuit
solar cell
data center
white light interferometry
multi layer
room temperature
film thickness