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Source/Drain Patterning FinFETs as Solution for Physical Area Scaling Toward 5-nm Node.
Jun-Sik Yoon
Seunghwan Lee
Junjong Lee
Jinsu Jeong
Hyeok Yun
Bohyeon Kang
Rock-Hyun Baek
Published in:
IEEE Access (2019)
Keyphrases
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machine learning
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databases
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linear programming
neural network
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data structure
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evolutionary algorithm
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