Erratum to "On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies" [MR 51/9-11 (2011) 1810-1818].
Usama ZaghloulGeorge J. PapaioannouBharat BhushanFabio CoccettiPatrick PonsRobert PlanaPublished in: Microelectron. Reliab. (2011)
Keyphrases
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