Internal transport in automated semiconductor manufacturing systems.
Jairo Rafael Montoya-TorresPublished in: 4OR (2007)
Keyphrases
- manufacturing systems
- manufacturing environment
- petri net
- flexible manufacturing systems
- quality control
- complex systems
- shop floor
- control structure
- manufacturing processes
- semi automated
- holonic manufacturing systems
- internal and external
- manufacturing process
- computer aided
- production rate
- semiconductor manufacturing
- multi agent systems
- deadlock detection
- gallium arsenide