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Automated visual inspection in the semiconductor industry: A survey.
Szu-Hao Huang
Ying-Cheng Pan
Published in:
Comput. Ind. (2015)
Keyphrases
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automated visual inspection
quality control
machine vision
defect detection
case study
target audience
multiscale
semiconductor manufacturing
data sets
neural network
real world
machine learning
knowledge base
world wide
fastest growing