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Low temperature low ppm acetone detection by Pd/TiO2/p-Si Metal-Insulator-Semiconductor devices.
Arnab Hazra
Basanta Bhowmik
K. Dutta
P. Bhattacharyya
Published in:
ICST (2013)
Keyphrases
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semiconductor devices
metal oxide
chemical vapor deposition
high temperature
field effect transistors
object detection
detection algorithm
automatic detection
false alarms
neural network
detection rate
detection method
x ray
clustering algorithm
high density
thin film
solid state
energy consumption
query processing