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Influence of various process steps on the reliability of PMOSFETs submitted to negative bias temperature instabilities.

Christelle BénardGaëtan MathPascal FornaraJean-Luc OgierDidier Goguenheim
Published in: Microelectron. Reliab. (2009)
Keyphrases
  • learning algorithm
  • process model
  • positive and negative
  • process control
  • databases
  • neural network
  • training data
  • training set
  • reliability analysis