Failure analysis methodology on donut pattern failure due to photovoltaic electrochemical effect.
Soh Ping NeoAlfred C. T. QuahGhim Boon AngDayanand NagalingamHnin Hnin MaSiong Luong TingC. W. SooChangqing ChenZhihong MaiJeffrey LamPublished in: Microelectron. Reliab. (2017)