Computational plasma nanoscience: Where plasma physics meets surface science.

Kostya Ostrikov Igor Levchenko S. Xu

Published in: Comput. Phys. Commun. (2007)

Keyphrases

scanning electron microscope
computer science
artificial intelligence
high energy
quantum mechanics
thin film
high density
plasma etching
d objects
three dimensional
high school students
chemical vapor deposition
shape recovery
surface model
mathematical programming
chemical reactions
physical sciences
data mining