A MEMS-Assisted Temperature Sensor With 20-µK Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2.
Meisam Heidarpour RoshanSamira ZaliaslKimo JooKamran SouriRajkumar PalwaiLijun Will ChenAmanpreet SinghSudhakar PamartiNicholas MillerJoseph C. DollCarl ArftSassan TabatabaeiCarl SechenAaron PartridgeVinod MenonPublished in: IEEE J. Solid State Circuits (2017)