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Evaluation of the nanoindentation behaviors of SiGe epitaxial layer on Si substrate.
Bo-Ching He
Chun-Hu Cheng
Hua-Chiang Wen
Yi-Shao Lai
Ping-Feng Yang
Meng-Hung Lin
Wen-Fa Wu
Chang-Pin Chou
Published in:
Microelectron. Reliab. (2010)
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