Login / Signup

Evaluation of the nanoindentation behaviors of SiGe epitaxial layer on Si substrate.

Bo-Ching HeChun-Hu ChengHua-Chiang WenYi-Shao LaiPing-Feng YangMeng-Hung LinWen-Fa WuChang-Pin Chou
Published in: Microelectron. Reliab. (2010)
Keyphrases