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Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection.
Maria Assunta Signore
Gabriele Rescio
Luca Francioso
Flavio Casino
Alessandro Leone
Published in:
Sensors (2024)
Keyphrases
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thin film
high density
short circuit
solar cell
multi layer
sensor networks
sensor data
detection algorithm
false positives
grain size
plasma etching
chemical vapor deposition
multi sensor
film thickness
databases
cost effective
multi view
fuzzy logic
data analysis