Fabrication of Miniaturized Capacitive Pressure Sensor using Thin Film Metallic Glass.
S. UejimaChiemi OkaSeiichi HataJunpei SakuraiPublished in: MHS (2018)
Keyphrases
- thin film
- high density
- plasma etching
- inertial measurement unit
- chemical vapor deposition
- sensor networks
- short circuit
- sensor data
- low density
- multi layer
- data center
- electron microscopy
- solar cell
- liquid crystal displays
- data streams
- integrated circuit
- multi sensor
- neural network
- visual odometry
- film thickness
- sensor fusion