Mass fabrication of 4H-SiC high temperature pressure sensors by femtosecond laser etching.
Lukang WangYou ZhaoYulong ZhaoYu YangBo LiTaobo GongPublished in: NEMS (2021)
Keyphrases
- high temperature
- integrated circuit
- plasma etching
- magnetic recording
- range sensors
- sensor networks
- sensor data
- laser range
- real time
- multi sensor
- high density
- flow rate
- data fusion
- thin film
- electron beam
- sensor technology
- regression model
- diesel engine
- high pressure
- sensor fusion
- laser radar
- input parameters
- prediction model
- neural network