carrier gas dependence of Young's modulus and hardness of chemical vapor deposited polycrystalline 3C-SiC thin films.
Gwiy-Sang ChungKi-Bong HanPublished in: Microelectron. J. (2008)
Keyphrases
- thin film
- electron microscopy
- chemical vapor deposition
- silicon nitride
- film thickness
- genetic algorithm
- short circuit
- high density
- grain size
- multi layer
- phase transition
- computational complexity
- diffusion process
- blind equalization algorithm
- solar cell
- np complete
- fiber optic
- np hard
- white light interferometry
- drug discovery
- low cost
- wavelet transform