Ultra-high voltage electron microscopy investigation of irradiation induced displacement defects on AlGaN/GaN HEMTs.
Hajime SasakiTakayuki HisakaKaoru KadoiwaTomoki OkuShinobu OnodaTakeshi OhshimaEiji TaguchiHidehiro YasudaPublished in: Microelectron. Reliab. (2018)