Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance.
Shinya ItoHiroaki NambaTsuyoshi HirataKoichi AndoShin KoyamaNobuyuki IkezawaTatsuya SuzukiTakehiro SaitohTadahiko HoriuchiPublished in: Microelectron. Reliab. (2002)