Shin Koyama

Publication Activity (10 Years)

Years Active: 2002-2002
Publications (10 Years): 0

Publications

Shinya Ito, Hiroaki Namba, Tsuyoshi Hirata, Koichi Ando, Shin Koyama, Nobuyuki Ikezawa, Tatsuya Suzuki, Takehiro Saitoh, Tadahiko Horiuchi
Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. Microelectron. Reliab. 42 (2) (2002)