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Physical analysis, trimming and editing of nanoscale IC function with backside FIB processing.
Rudolf Schlangen
Reiner Leihkauf
Uwe Kerst
Ted R. Lundquist
Peter Egger
Christian Boit
Published in:
Microelectron. Reliab. (2009)
Keyphrases
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wide range
statistical analysis
information retrieval
data analysis
data processing
real time
data sets
machine learning
website
relational databases
evolutionary algorithm
quantitative analysis
integrated circuit