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Robust control of rapid thermal processes applied to vapor deposition processing.
Stanislav Aranovskiy
Aleksandr A. Kapitonov
Alexey A. Bobtsov
Anton A. Pyrkin
Evgeny Zavarin
Denis Davydov
Romeo Ortega
Published in:
ICUMT (2014)
Keyphrases
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real time
control system
information systems
infrared
optimal control
thin film
social networks
decision making
fuzzy logic
data processing
computationally efficient
process model
path planning
control strategy
partial occlusion
control method