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Characterization of Ultrathin Gate Dielectrics for Nanoscale CMOS Applications.
Gi-Wan Yoon
Linh Mai
Jae-Young Lee
Published in:
J. Inform. and Commun. Convergence Engineering (2007)
Keyphrases
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gate dielectrics
electrical properties
si sio
field effect transistors
atomic force microscopy
data sets
database
databases
genetic algorithm