Zirconium Oxide Dielectric Layer: Preparation and Characterization with Various Volumes of Acetylacetone.

Chih-Feng Yen Shen-Hao Tsao Yu-Ya Huang

Published in: ICKII (2022)

Keyphrases

silicon dioxide
high temperature
three dimensional
electrical properties
silicon nitride
space charge
data collection
real time
computer vision
image processing
leakage current
information systems
single layer