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Electrical properties of MIS capacitor using low temperature electron beam gun - evaporated HfAlO dielectrics.
V. Mikhelashvili
B. Meyler
J. Shneider
O. Kreinin
Gadi Eisenstein
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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electron beam
electrical properties
thin film
short circuit
x ray
design parameters
metal oxide
integrated circuit
management information systems
information systems
power supply
semiconductor devices
film thickness
transmission line
silicon nitride
fitness function
fuzzy logic
control system
neural network