Multiscale modeling and control of RF diode sputter deposition for GMR thin films.

Sarbajit Ghosal Robert L. Kosut Jon L. Ebert La Moyne L. Porter

Published in: ACC (2004)

Keyphrases

thin film
multiscale
high density
short circuit
grain size
plasma etching
chemical vapor deposition
control system
multi layer
scale space
computer simulation
control method
film thickness
image processing
solar cell
three dimensional
wavelet transform
genetic algorithm
white light interferometry