Fabrication of a thin-film capacitive force sensor array for tactile feedback in robotic surgery.
Omeed H. PaydarChristopher R. WottawaRichard E. FanErik P. DutsonWarren S. GrundfestMartin O. CuljatRob N. CandlerPublished in: EMBC (2012)
Keyphrases
- thin film
- force feedback
- sensor array
- visual feedback
- high density
- haptic feedback
- contact force
- plasma etching
- robotic arm
- human operators
- robot assisted
- chemical vapor deposition
- surgical robot
- line fitting
- short circuit
- solar cell
- visual servoing
- mobile robot
- data center
- room temperature
- end effector
- multi layer
- degrees of freedom
- liquid crystal displays
- white light interferometry
- distance measurement
- noisy images
- least squares
- multiresolution