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Fabrication and characterization of a novel multi-annular type backscattered electron detector for SEM.
Yun-Ju Chuang
Pei-Ru Chen
Wei-Rui Lin
Fu-Ron Chen
Published in:
NEMS (2013)
Keyphrases
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electron beam
detection algorithm
data mining
electrical properties
image segmentation
multiscale
multi agent
expert systems
hidden markov models
website
detection method
image formation
design parameters
genetic algorithm
electric field
real time
negative selection algorithm
transmission electron microscopy