Porous silicon thin film as CO sensor.

H. M. Martinez N. E. Rincon J. Torres J. E. Alfonso

Published in: Microelectron. J. (2008)

Keyphrases

thin film
solar cell
high density
plasma etching
chemical vapor deposition
chance discovery
silicon nitride
sensor networks
short circuit
multi layer
sensor data
low density
multi sensor
high speed
electron microscopy
room temperature
low cost
data visualization
fuzzy logic
database