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Temperature stability of electro-thermally and piezoelectrically actuated silicon carbide MEMS resonators.
G. S. Wood
I. Gual
P. Parmiter
Rebecca Cheung
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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infrared
high speed
limit cycle
low cost
chemical vapor deposition
neural network
space charge
high density
stability analysis
force control
gallium arsenide
data sets
high temperature
open loop
nonlinear systems
control law
control scheme
x ray