Fabrication of silicon nanopillars array for developing PCs sensor.
Mao-Jung HuangChii-Rong YangChien-Ying SuMing-Hua ShiaoPublished in: NEMS (2013)
Keyphrases
- high density
- high speed
- charge coupled device
- semiconductor devices
- plasma etching
- sensor data
- sensor networks
- focal plane
- database
- low cost
- sensor array
- personal computer
- image sensor
- sensor fusion
- real time
- high sensitivity
- data streams
- electron beam
- integrated circuit
- multi sensor
- digital camera
- silicon on insulator
- three dimensional