Extraction of defect density and size distributions from wafer sort test results.
Jeffrey E. NelsonThomas ZanonRao DesineniJason G. BrownN. PatilWojciech MalyR. D. (Shawn) BlantonPublished in: DATE (2006)
Keyphrases
- statistical tests
- neural network
- database
- massively parallel
- probability density
- knowledge extraction
- kolmogorov smirnov
- semiconductor manufacturing
- software testing
- integrated circuit
- memory requirements
- probability distribution
- automatic extraction
- graphical models
- maximum number
- information extraction
- computational complexity
- genetic algorithm
- data sets