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A Compact Monitoring Circuit to Accurately Extract Fabrication Deviation in Silicon Waveguides.
Tsuyoshi Horikawa
Hideaki Okayama
Yosuke Onawa
Daisuke Shimura
Jun Ushida
Akemi Shiina
Tadashi Murao
Hiroki Yaegashi
Published in:
ECOC (2020)
Keyphrases
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semiconductor devices
high speed
high density
silicon on insulator
gallium arsenide
electron beam
monitoring system
real time
low cost
field effect transistors
low power
high data rate
low density
integrated circuit
cmos technology
plasma etching