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Surface orientation dependence of ion bombardment damage during plasma processing.

Yukimasa OkadaKoji EriguchiKouichi Ono
Published in: ICICDT (2015)
Keyphrases
  • surface orientation
  • shape from shading
  • high energy
  • light source
  • photometric stereo
  • planar surfaces
  • shape recovery
  • surface normals
  • camera calibration