Novel Feature Vectors Considering Distances between Wires for Lithography Hotspot Detection.
Gaku KataokaMasato InagiShinobu NagayamaShin'ichi WakabayashiPublished in: DSD (2018)
Keyphrases
- feature vectors
- euclidean distance
- automatic detection
- detection algorithm
- detection accuracy
- false positives
- detection scheme
- feature space
- detection rate
- object detection
- feature extraction
- subband
- detection method
- distance measure
- real time
- nearest neighbor
- gaussian mixture model
- event detection
- hidden markov models
- video sequences
- false alarms
- multiscale
- electron beam