PPA and Scaling Potential of Backside Power Options in N2 and A14 Nanosheet Technology.
S. YangPieter SchuddinckMarie Garcia BardonYang XiangAnabela VelosoB. T. ChanGioele MirabelliGaspard HiblotGeert HellingsJulien RyckaertPublished in: VLSI Technology and Circuits (2023)