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Raman bands in microwave plasma assisted chemical vapour deposited films.
Magdalena Kadlecíková
Juraj Breza
Marián Veselý
Zdenek Frgala
Vít Kudrle
Jan Janca
Jan Janík
Jirí Bursík
Published in:
Microelectron. J. (2003)
Keyphrases
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chemical vapor deposition
thin film
high density
multi component
frequency domain
raman spectra
hyperspectral images
image processing
multi layer
frequency band
drug discovery
electron microscopy
electrical properties