Wafer map failure pattern recognition based on deep convolutional neural network.
Shouhong ChenYuxuan ZhangXingna HouYuling ShangPing YangPublished in: Expert Syst. Appl. (2022)
Keyphrases
- convolutional neural network
- pattern recognition
- neural network
- face detection
- image processing
- computer vision
- feature extraction
- image analysis
- pattern recognition problems
- maximum a posteriori
- semiconductor manufacturing
- real time
- failure detection
- pattern analysis
- pattern classification
- signal processing
- machine learning
- support vector machine svm
- failure rate
- deep learning
- integrated circuit
- massively parallel
- topological map
- rough sets
- face recognition