Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing.
Edward A. RietmanSuresh H. PatelEarl R. LoryPublished in: Comput. Oper. Res. (1996)
Keyphrases
- manufacturing process
- process control
- control system
- discrete event
- quality control
- product design
- manufacturing systems
- product quality
- real time
- plasma etching
- vision system
- simulation model
- expert knowledge
- machine vision
- electronic commerce
- open source
- object oriented
- image analysis
- natural language
- artificial intelligence